 Temperature
Control for MOCVD
Noah Precision introduces the “POU therMOstat*”
for use on MOCVD, ALD and other process tools using
source bubblers.
Conventional open-bath, air-cooled chillers evaporate
and condense moisture at or below dew-point temperatures.
Moisture released into the tool electronics cabinet
can lead to reliability issues with process tool electronics
and contribute to temperature drift. The heat exhaust
from the most commonly used open-bath chillers also
interferes with process tool electronic calibration
and stability, leading to poor reliability, higher
CoO and increased down-time.
Open bath chillers simply do not have adequate temperature
control resolution to manage the gas vapor pressures
as a function of temperature. The graph below shows
an example of TrimethylGallium (TMG) Vapor Pressure
vs. Temperature and the potential drift window. Metal
organic temperature control is critical to process
stability and an essential prerequisite to maintain
uniform vapor pressure and evaporation rates.
- MO temperature control is critical to process
stability
- Vapor pressure changes due to temperature drift
The Noah POU therMOstat utilizes proven and reliable
technology and includes Devicenet communication
functionality. This system provides unparalleled
reliability, low Cost of Ownership and temperature
control accuracy of +0.1 °C.
Sizing Kit Options
Diameter |
Length |
Part Number |
2 inch single source |
Up to 10 inches |
903-S2-DIAMETER |
3 inch single source |
Up to 10 inches |
903-S3-DIAMETER |
4 inch single source |
Up to 10 inches |
903-S4-DIAMETER |
Dual 2 inch double source |
Up to 10 inches |
903-D2-DIAMETER |
Please contact
Noah Precision for more information about the
POU therMOstat.
* POU therMOstat Patent Pending
|
