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Point-of-Use (POU) Specifications

Jump to:  Noah 3300 Specifications  |  Noah 3500 Speicications

Noah 3300 Specifications

 

General Specifications

Thermoelectric Cooling Capacity

1200 W @ 20°C (4100 BTU/hr at 68°F)

Heat Dissipation

Water cooling

Temperature Range

-20°C to 90°C (-4°F to 194°F)

Temperature Sensor

Platinum, 100 RTD

Process Fluid

Fluorinert® or Galden®

Reservoir Volume

2.8 l (0.75 gal)

Process Fluid Flow

Up to 22.7 lpm (6 gpm)

Mounting

Frame-integrated, sub-floor tile mounting, or freestanding

Communications

Applied CHX, LAM analog, LonWorks, TEL, and other protocols available

Dimensions 

Point-of-use module

56 cm (H) x 11.56 cm (W) x 30.0 cm (D)
22.08" (H) x 4.55" (W) x 11.82" (D)

Power supply controller

8.76 cm (H) x 48.26 cm (W) x 65.28 cm (D)
3.45" (H) x 19.00" (W) x 25.70" (D)

Weight 

Point-of-use module

25 kg (55 lb)

Power supply controller

  • PSCe = 20 kg (44 lb)

Facilities Installation

Controller

48.26 cm (19") rack mounted

Electrical Service

208 Vac, 50-60 Hz, 3-phase, 15 A, 4-wire Δ, NEMA L15-30 power connector, CE certification, TUV type approved

Process Connectors

  • 0.5" & 0.75" diameter
  • 90° or straight fittings
  • Push-on or Compression Style

Facility Connectors

0.5" compression fittings

Facility Cooling Water

Temperature

≤20°C (≤68°F)

Pressure

ΔP ≥2.1 kg/cm2 (≥30 psi)

Flow Rate

≥17 lpm (≥4.5 gpm)

 

 

 

Noah 3500 Specifications

 

General Specifications

Thermoelectric Cooling Capacity

2500 W @ 20°C (8530 BTU/hr at 68°F)

Heat Dissipation

Water cooling

Temperature Range

-20°C to 90°C (-4°F to 194°F)

Temperature Sensor

Platinum, 100 RTD

Process Fluid

Fluorinert® or Galden®

Reservoir Volume

2.8 l (0.75 gal)

Process Fluid Flow

Up to 22.7 lpm (6 gpm)

Mounting

Frame-integrated, sub-floor tile mounting, or freestanding

Communications

Applied CHX, LAM analog, LonWorks, TEL, and other protocols available

Dimensions 

Point-of-use module

54.5 cm (H) x 19.4 cm (W) x 30.0 cm (D)
21.48" (H) x 7.65" (W) x 13.13" (D)

Power supply controller

8.76 cm (H) x 48.26 cm (W) x 65.28 cm (D)
3.45" (H) x 19.00" (W) x 25.70" (D)

Weight 

Point-of-use module

38.6 kg (85 lb)

Power supply controller

  • PSCe = 20 kg (44 lb)

Facilities Installation

Controller

48.26 cm (19") rack mounted

Electrical Service

208 Vac, 50-60 Hz, 3-phase, 30 A, 4-wire Δ, NEMA L15-30 power connector, CE certification, TUV type approved

Process Connectors

  • 0.5" & 0.75" diameter
  • 90° or straight fittings
  • Push-on or Compression Style

Facility Connectors

0.5" compression fittings

Facility Cooling Water

Temperature

≤20°C (≤68°F)

Pressure

ΔP ≥2.1 kg/cm2 (≥30 psi)

Flow Rate

≥17 lpm (≥4.5 gpm)

 

 

 

 
Offering a Complete Range of Thermoelectric Temperature
Control Systems, Including Dynamic Point-of-Use Chillers
for Semiconductor Wafer Processing Equipment.
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of the respective trademark owners.
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