| The POU evolution is a logical
progression and maturation of our highest performance
and lowest Cost-of-Ownership temperature control system,
the Noah “Point-of-Use chiller”.
Noah Precision continues to meet the demands of
<90nm technology nodes for 200mm & 300mm
Plasma Etch applications by introducing new and
improved products that compliment our market reputation
for providing the BEST in Thermoelectric Temperature
Control Systems...
Improved Power Supply Controller – The “PSCe”
The PSCe is the result of years of accumulated customer
feedback, testing and development. Noah Precision,
LLC is proud to announce the introduction and availability
of the PSCe.
The PSCe is an interchangeable alternative to the
current model PSC 4400 and PSC 8800. Its design
incorporates state-of-the-art technology into a
single, “universal” PSC. The PSCe is
designed to be transparent to the POU 3300 &
POU 3500 modules and to all Etch tool types and
applications.
The PSC 4400 & PSC 8800 models will be discontinued
in 2007; however, they will continue to be fully
supported for the next 5 years.
 Improved
reliability- Increased efficiency
- Universal design
- Added new communications protocols
- New look with same operator interface
- 100% backwards compatibility with
the POU 3300 & 3500
- Smaller and lighter than the current
power supply controller models
Features |
Benefits |
| Backward compatibility |
The PSCe is a pin-to-pin compatible and interchangeable
alternative to the current model PSC4400 and
PSC8800. It is designed for “Plug and
Play”. |
Improved reliability |
The PSCe incorporates multiple design improvements
and state-of-the-art components, which improve
reliability and reduce faulty alarms. |
Height and weight |
The PSCe height is 2/3 of the PSC and weighs
30% less. This reduces space, lowers shipping
costs and simplifies installation. |
Universal design |
The new front panel design is modern and
has a more distinctive look and feel. The part
count for the PSCe has been reduced significantly,
which improves reliability and manufacturability.
A single common PSCe reduces spares inventory
and simplifies logistics. |
| Optical Communication |
Communication between the tool and the chiller
is with a microcontroller over an optical bus.
Isolating the communication eliminates noise
prone analog signals and faulty alarms to the
PSCe. |
Energy efficient |
The PSCe is significantly more energy efficient
than the PSC making it a more economical choice.
The power devices in the PSCe run cooler, which
increases system reliability. |
Remote Communications Module for 300mm Digital Protocols
– The “RCMe”
The new Noah Precision RCMe gateway provides digital
interfacing between Noah POU systems and 300mm process
tools that communicate with LonWorks* and DeviceNet*
protocols. For Lam 2300 chambers utilizing LonWorks,
the RCMe will take the place of the Lam Gateway
(D-to-A), Lam Gateway power supply, Noah Lon RCM
(A-to-D), and many interconnect cables, thereby
providing significant cost savings and increased
reliability, as well as more accurate and reliable
temperature control. This new interface has been
designed to be compatible with the existing Noah
Power Supply Controllers, model PSC-4400 & PSC-8800,
and the PSCe.
* NOTE: The DeviceNet portion of the RCMe
will remain dormant until market demand for Noah POU
systems upon equipment supported solely by DeviceNet
triggers the necessary RCMe revisions.
The RCMe offers the following benefits:
- Reduced number of interface components
(cost reduction of $7,500 or more per chamber)
- Purely digital interfacing improves
temperature control accuracy & chamber matching
- Elimination of ‘30 °C lock-up’
mode
Less downtime than with Lam Gateway
- Much simpler installations
|
