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The POU evolution is a
logical progression and maturation of our highest performance and
lowest Cost-of-Ownership temperature control system, the Noah
“Point-of-Use chiller”.
Noah Precision continues to meet the demands
of <90nm technology nodes for 200mm & 300mm Plasma Etch
applications by introducing new and improved products that compliment
our market reputation for providing the BEST in Thermoelectric
Temperature Control Systems...
Improved Power Supply Controller – The “PSC”
The PSC is the result of years of
accumulated customer feedback, testing and development. Noah Precision,
LLC is proud to announce the introduction and availability of the PSC.
The PSC is an interchangeable alternative to
the discontinued models PSC 4400 and PSC 8800. Its design incorporates
state-of-the-art technology into a single, “universal” PSC. The PSC is
designed to be transparent to the POU 3300 & POU 3500 modules and
to all Etch tool types and applications.
The PSC 4400 & PSC 8800 models were
discontinued in 2007; however, they will continue to be fully supported
until 2012.
 Improved
reliability- Increased efficiency
- Universal design
- Added new communications
protocols
- New look with same operator
interface
- 100% backwards compatibility
with the POU 3300 & 3500
- Smaller and lighter than the
current power supply controller models
Features
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Benefits
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Backward compatibility
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The PSC is a pin-to-pin compatible and
interchangeable alternative to the discontinued models PSC4400 and
PSC8800. It is designed for “Plug and Play”.
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Improved reliability
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The PSC incorporates multiple design
improvements and state-of-the-art components, which improve reliability
and reduce faulty alarms.
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Height and weight
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The PSC height is 2/3 of the PSC and
weighs 30% less. This reduces space, lowers shipping costs and
simplifies installation.
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Universal design
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The new front panel design is modern
and has a more distinctive look and feel. The part count for the PSC
has been reduced significantly, which improves reliability and
manufacturability. A single common PSC reduces spares inventory and
simplifies logistics.
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Optical Communication
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Communication between the tool and the
chiller is with a microcontroller over an optical bus. Isolating the
communication eliminates noise prone analog signals and faulty alarms
to the PSC.
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Energy efficient
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The PSC is significantly more energy
efficient than the PSC making it a more economical choice. The power
devices in the PSC run cooler, which increases system reliability.
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Remote Communications Module for 300mm
Digital Protocols – The “RCMe”
The Noah Precision RCMe gateway provides
digital interfacing between Noah POU systems and 300mm process tools
that communicate with LonWorks* and DeviceNet* protocols. For Lam 2300
chambers utilizing LonWorks, the RCMe takes the place of the Lam
Gateway (D-to-A), Lam Gateway power supply, Noah Lon RCM (A-to-D), and
many interconnect cables, thereby providing significant cost savings
and increased reliability, as well as more accurate and reliable
temperature control. This interface has been designed to be
compatible with the existing Noah Power Supply Controllers, models
PSC-4400 & PSC-8800, and the PSC.
* NOTE: The DeviceNet portion of the
RCMe will remain dormant until market demand for Noah POU systems upon
equipment supported solely by DeviceNet triggers the necessary RCMe
revisions.
The RCMe offers the following benefits:
- Reduced number of interface
components (cost reduction of $7,500 or more per chamber)
- Purely digital interfacing
improves temperature control accuracy & chamber matching
- Elimination of ‘30 °C
lock-up’ mode
 Less downtime than with Lam Gateway
- Much simpler installations
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