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Noah POU Installation Example

ZERO Footprint at the fab level

 

POU Installation Example

  • LAM Alliance 4520
  • 2 loops installed
  • sub-floor 3300 POU (2x)
  • PSC (2x) in Sub-Fab 2nd level

 

 

 

 
Offering a Complete Range of Thermoelectric Temperature
Control Systems, Including Dynamic Point-of-Use Chillers
for Semiconductor Wafer Processing Equipment.
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