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Stand-Alone Systems
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Noah Stand-Alone Temperature Control Systems offer proven temperature control
technology for processes that require a fixed temperature
set-point. These systems are similar to conventional
systems and offer substantial advantages. Specifically,
Stand-Alone units are much more compact and reliable,
requiring less maintenance than conventional, compressor-based
units. The Noah systems can be easily retrofitted
into existing applications with “plug-and-play”
ease, providing a broad range of operating temperatures
and heating/cooling capacities.
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Benefits
- Superior accuracy and reliability
- Small-sized units conserve valuable
space
- Environmentally friendly
- Lower Cost-of-Ownership (CoO)
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In addition, some Stand-Alone models
can be operated in conjunction with Noah Point-Of-Use
(POU) dynamic temperature control systems for a complete
chamber wall and wafer chuck (cathode/electrode) temperature
control solution, offering a lower Cost-of-Ownership
alternative for our customers.
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- track, optical coating, lasers,
etch
- thermoelectric temperature control
- very small footprint
- compressor-free
Noah Model 2015
- etch, cmp, implant
- thermoelectric temperature
control
- small footprint
- compressor-free
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Noah Model 2008
- chamber wall, cvd, cmp, etch
- small footprint
- 6kW capacity
Noah Model 2021
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