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Stand-Alone Specifications
Jump to: 2008 Specifications
| 2015 Specifications
| 2021 Specifications
Noah 2008 Specifications
General Specifications |
Applications
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Plasma etch
Track
Optical coating
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Heating /Cooling Capacity
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800 W / 450 W @ 20°C
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Temperature Range
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+15°C to +35°C (+59°F to +95°F)
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Pump Capacity
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7.6 lpm (2 gpm) at 1.4 bar (20 psi)
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Input Power
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120 V, 20 A, single phase
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Cooling
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Facilities cooling water
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Heat Transfer Medium
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H2O, EG, PF
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Dimensions |
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With DI resistivity package
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Not applicable
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Without DI resistivity package
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(43.2 cm (D) x 21.1 cm (W)
x 24.9 cm (H);
17.0" (D) x 8.3" (W) x 9.8"
(H)
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Noah 2015 Specifications
General Specifications |
Applications
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Chamber wall and general purpose
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Heating /Cooling Capacity
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6000 W / 665 W @ 25°C
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Temperature Range
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+35°C to +90°C (+95°F to +194°F)
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Pump Capacity
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15.1 lpm (4 gpm) at 4.1 bar (60 psi)
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Input Power
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208 V, 30 A, 3-phase
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Cooling
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Facilities cooling water
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Heat Transfer Medium
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H2O, EG, PF, DI
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Dimensions |
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With DI resistivity package
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89.7 cm (D) x 35.6 cm (W)
x 67.3 cm (H);
35.3" (D) x 14.0" (W) x 28.0"
(H)
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Without DI resistivity package
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73.9 cm (D) x 29.2 cm (W)
x 71.1 cm (H);
29.1" (D) x 11.5" (W) x 28.0"
(H)
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Noah 2021 Specifications
General Specifications |
Applications
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Etch, Strip, CVD and general purpose
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Heating /Cooling Capacity
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3200 W / 1600 W @ 20°C
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Temperature Range
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-10°C to +80°C (+14°F to +176°F)
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Pump Capacity
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15.1 lpm (4 gpm) at 4.1 bar (60 psi)
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Input Power
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208 V, 30 A, 3-phase
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Cooling
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Facilities cooling water
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Heat Transfer Medium
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H2O, EG, PF, DI
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Dimensions |
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With DI resistivity package
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79.5 cm (D) x 35.6 cm (W)
x 67.3 cm (H);
31.3" (D) x 14.0" (W) x 26.5"
(H)
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Without DI resistivity package
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63.8 cm (D) x 29.2 cm (W)
x 67.3 cm (H);
25.1" (D) x 11.5" (W) x 26.5"
(H)
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