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The therMOstat System is not "Just another Chiller" for MOCVD

Temperature Control for Source Bubblers

 

The Noah Precision therMOstat Family* is the first thermoelectric temperature control system designed specifically for MOCVD temperature control. The therMOstat system was designed and manufactured with feedback from

MOCVD tool owners and OEM equipment manufacturers to address the shortfalls associated with existing compressor based chillers.

 

Below are five considerations for selecting a Temperature Control System for MOCVD source temperature control:

  1. The therMOstat incorporates solid state Peltier devices with no moving parts to provide both heating and cooling in a single device. This is a significant advance over mechanical chillers with multiple moving parts.
  2. The thermoelectric heat pump is only one aspect of the therMOstat system design. The switching & control system incorporated into the therMOstat allows for tight temperature control by switching from heating to cooling, or visa-versa based upon small changes in reservoir temperature.
  3. Temperature stability has been de-coupled from incoming facility water temperature. The reservoir in the therMOstat has been optimized to provide thermal stability of the heat transfer fluid. Temperature stability is achieved by consistent monitoring of process fluid temperature, uniform circulation of fluid and by either adding or removing heat to maintain set-point within +/- 0.1 degree C.
  4. The therMOstat surrounds the source bubbler in an enclosed environment and is able to accommodate a variety of source geometries. Open bath chillers evaporate moisture into an electronics cabinet, which complicates electronics calibration and contributes to temperature drift.
  5. The therMOstat addresses the need for low cost of ownership in 4 ways:
  • The therMOstat is designed to be maintenance free. There is no annual PM schedule.
  • The therMOstat is designed to significantly reduce the cost of facility water plumbing and installation inside the tool. Up to 5 therMOstat systems can be installed in series.
  • The therMOstat has a single moving part, which allows end users to comfortably achieve MTBF of > 30,000 hours.
  • The reliability of the therMOstat dramatically improves tool availability and up-time. A significant reduction in spares and related repair costs accelerate payback.

Sizing Kit Options

 

Part Number

Description

900-MO8

therMOstat 8.0 module

901-MO8-D2

Dual 51mm / 2.0" Bubbler Kit (fits 49.53mm - 52.07mm bubblers)

901-MO8-S2.2

Single 56mm / 2.2" Bubbler Kit (fits 53.34mm - 58.17mm bubblers)

901-MO8-S2.4

Single 61mm / 2.4" Bubbler Kit (fits 58.42mm - 63.25mm bubblers)

901-MO8-S2.6

Single 66mm / 2.6" Bubbler Kit (fits 63.50mm - 68.33mm bubblers)

901-MO8-S2.8

Single 71mm / 2.8" Bubbler Kit (fits 68.58mm - 73.41mm bubblers)

901-MO8-S3

Single 76mm / 3" Bubbler Kit (fits 73.66mm - 78.49mm bubblers)

901-MO8-S3.2

Single 81mm / 3.2" Bubbler Kit (fits 78.74mm - 83.57mm bubblers)

901-MO8-S3.4

Single 86mm / 3.4" Bubbler Kit (fits 83.82mm - 88.65mm bubblers)

901-MO8-S3.6

Single 91mm / 3.6" Bubbler Kit (fits 88.90mm - 93.73mm bubblers)

901-MO8-S3.8

Single 97mm / 3.8" Bubbler Kit (fits 93.98mm - 98.81mm bubblers)

901-MO8-S4.0

Single 102mm / 4" Bubbler Kit (fits 99.06mm - 103.89mm bubblers)

901-MO8-S4.2

Single 107mm / 4.2" Bubbler Kit (fits 104.14mm - 108.97mm bubblers)

900-MO10

therMOstat 10.0 module

901-MO10-S4.4

Single 112mm / 4.4" Bubbler Kit (fits 109.22mm - 114.05mm bubblers)

901-MO10-S4.6

Single 117mm / 4.6" Bubbler Kit (fits 114.30mm - 119.13mm bubblers)

901-MO10-S4.8

Single 122mm / 4.8" Bubbler Kit (fits 119.38mm - 124.21mm bubblers)

901-MO10-S5.0

Single 127mm / 5.0" Bubbler Kit (fits 124.46mm - 129.29mm bubblers)

901-MO10-S5.2

Single 132mm / 5.2" Bubbler Kit (fits 129.54mm - 134.37mm bubblers)

901-MO10-S5.4

Single 137mm / 5.4" Bubbler Kit (fits 134.62mm - 139.45mm bubblers)

901-MO10-S5.6

Single 142mm / 5.6" Bubbler Kit (fits 139.70mm - 144.53mm bubblers)

901-MO10-S5.8

Single 147mm / 5.8" Bubbler Kit (fits 144.78mm - 149.61mm bubblers)

901-MO10-S6.0

Single 152mm / 6.0" Bubbler Kit (fits 149.86mm - 154.69mm bubblers)

901-MO10-S6.2

Single 157mm / 6.2" Bubbler Kit (fits 154.94mm - 159.77mm bubblers)

901-MO10-S6.4

Single 163mm / 6.4" Bubbler Kit (fits 160.02mm - 164.85mm bubblers)

901-MO10-S6.6

Single 168mm / 6.6" Bubbler Kit (fits 165.10mm - 169.93mm bubblers)

901-MO10-D2.4

Dual  61mm / 2.4" Bubbler Kit (fits 58.42mm - 63.25mm bubblers)

901-MO10-D2.6

Dual 66mm / 2.6" Bubbler Kit (fits 63.50mm - 68.33mm bubblers)

901-MO10-D2.8

Dual 71mm / 2.8" Bubbler Kit (fits 68.58mm - 73.41mm bubblers)

901-MO10-D3.0

Dual 76mm / 3" Bubbler Kit (fits 73.66mm - 78.49mm bubblers)

901-MO10-T2

Triple 51mm / 2" Bubbler Kit (fits 48.26mm - 53.09mm bubblers)

901-MO10-T2.2

Triple 56mm / 2.2" Bubbler Kit (fits 53.34mm - 58.17mm bubblers)

 

The Noah therMOstat utilizes proven and reliable technology and includes DeviceNet communication functionality. This system provides unparalleled reliability, low Cost of Ownership and temperature control accuracy of +0.1 °C.

 

therMOstat vs. refrigerant TCU

 

 

TCU 1

TCU 2

therMOstat

Technology Base

Mechanical

Compressor

Mechanical

Compressor

Solid State, Thermo

Electric

Footprint

108 inch2

293 inch2

78 inch2

Height

21.5 inch

21.5 inch

16.0 inch

Weight

53 lb

80.0 lb

40.0 lb

Power Consumption  

1.80 kW- hr

1.90 kW-hr

~ 0.50 kW-hr

Maximum Annual
power cost @
($0.12/kW)

$1496

$2000.00

$613.00

Daily operator
assistance

1⁄2 hr daily

1⁄2 hr daily

none

MTBF

15,000 hrs

15,000 hrs

30,000 hrs

Carbon emissions
impact (.87 lbs of

carbon = 1 kW-hr)

1.566 lb
13,703 lbs annualized

1.653 lb
14,462 lbs annualized

.43 lb
3767 lbs annualized

Warranty

12 months

12 months

24 months

 

 

Demand Analysis – Noah Precision therMOstat 8.0

 

2008/11/04 17:30:00 - 2008/11/08 09:00:00 Demand Interval: 15 Minutes

 

 

 

Demand Analysis – Refrigerant based compressor

 

2008/10/21 08:45:00 - 2008/10/25 00:15:00 Demand Interval: 15 Minutes

 

 

 

 

 

 

Please contact Noah Precision for more information about the therMOstat.

 

* therMOstat Patent Pending
 
Offering a Complete Range of Thermoelectric Temperature
Control Systems, Including Dynamic Point-of-Use Chillers
for Semiconductor Wafer Processing Equipment.
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