Temperature Control for Source Bubblers
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The Noah Precision POU therMOstat
Family* is the first thermoelectric temperature
control system designed specifically for MOCVD temperature control. The
therMOstat system was designed and manufactured with feedback from
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MOCVD tool owners and OEM equipment
manufacturers to address the shortfalls associated with existing
compressor based chillers.
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Below are five considerations for selecting
a Temperature Control System for MOCVD source temperature control:
- The therMOstat incorporates
solid state Peltier devices with no moving parts to provide both
heating and cooling in a single device. This is a significant advance
over mechanical chillers with multiple moving parts.
- The thermoelectric heat pump
is only one aspect of the therMOstat system design. The switching &
control system incorporated into the therMOstat allows for tight
temperature control by switching from heating to cooling, or visa-versa
based upon small changes in reservoir temperature.
- Temperature stability has
been de-coupled from incoming facility water temperature. The reservoir
in the therMOstat has been optimized to provide thermal stability of
the heat transfer fluid. Temperature stability is achieved by
consistent monitoring of process fluid temperature, uniform circulation
of fluid and by either adding or removing heat to maintain set-point
within +/- 0.1 degree C.
- The therMOstat surrounds the
source bubbler in an enclosed environment and is able to accommodate a
variety of source geometries. Open bath chillers evaporate moisture
into an electronics cabinet, which complicates electronics calibration
and contributes to temperature drift.
- The therMOstat addresses the
need for low cost of ownership in 4 ways:
- The therMOstat is designed
to be maintenance free. There is no annual PM schedule.
- The therMOstat is designed
to significantly reduce the cost of facility water plumbing and
installation inside the tool. Up to 5 therMOstat systems can be
installed in series.
- The therMOstat has a single
moving part, which allows end users to comfortably achieve MTBF of >
30,000 hours.
- The reliability of the
therMOstat dramatically improves tool availability and up-time. A
significant reduction in spares and related repair costs accelerate
payback.
Sizing Kit Options
Diameter
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Length
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Part Number
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2 inch single source
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Up to 10 inches
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903-S2-DIAMETER
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3 inch single source
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Up to 10 inches
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903-S3-DIAMETER
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4 inch single source
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Up to 10 inches
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903-S4-DIAMETER
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Dual 2 inch double source
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Up to 10 inches
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903-D2-DIAMETER
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The Noah POU therMOstat utilizes proven and
reliable technology and includes DeviceNet communication functionality.
This system provides unparalleled reliability, low Cost of Ownership
and temperature control accuracy of +0.1 °C.
therMOstat vs. refrigerant TCU
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TCU 1
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TCU 2
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therMOstat |
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Technology Base
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Mechanical
Compressor
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Mechanical
Compressor
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Solid State, Thermo
Electric
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Footprint
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108 inch2
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293 inch2
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78 inch2
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Height
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21.5 inch
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21.5 inch
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16.0 inch
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Weight
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53 lb
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80.0 lb
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40.0 lb
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Power Consumption
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1.80 kW- hr
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1.90 kW-hr
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~ 0.50 kW-hr
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Maximum Annual
power cost @
($0.12/kW)
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$1496
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$2000.00
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$613.00
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Daily operator
assistance
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1⁄2 hr daily
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1⁄2 hr daily
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none
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MTBF
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15,000 hrs
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15,000 hrs
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30,000 hrs
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Carbon emissions
impact (.87 lbs of
carbon = 1 kW-hr)
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1.566 lb
13,703 lbs annualized
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1.653 lb
14,462 lbs annualized
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.43 lb
3767 lbs annualized
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Warranty
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12 months
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12 months
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24 months
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Demand Analysis – Noah Precision therMOstat
8.0
2008/11/04 17:30:00 - 2008/11/08 09:00:00
Demand Interval: 15 Minutes
Demand Analysis – Refrigerant based
compressor
2008/10/21 08:45:00 - 2008/10/25 00:15:00
Demand Interval: 15 Minutes
Please contact Noah Precision for more information about
the POU therMOstat.
* POU therMOstat Patent Pending
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