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Temperature Control for Source Bubblers

The Noah Precision POU therMOstat 8.0* is the first thermoelectric temperature control system designed specifically for MOCVD temperature control. The therMOstat system was designed and manufactured with feedback from MOCVD tool owners and OEM equipment manufacturers to address the shortfalls associated with existing compressor based chillers. The therMOstat represents the state-of-the-art in MOCVD source temperature control.

Below are five considerations for selecting a Temperature Control System for MOCVD source temperature control:

1. The therMOstat incorporates solid state Peltier devices with no moving parts to provide both heating and cooling in a single device. This is a significant advance over mechanical chillers with multiple moving parts.
2. The thermoelectric heat pump is only one aspect of the therMOstat system design. The switching & control system incorporated into the therMOstat allows for tight temperature control by switching from heating to cooling, or visa-versa based upon small changes in reservoir temperature.
3. Temperature stability has been de-coupled from incoming facility water temperature. The reservoir in the therMOstat has been optimized to provide thermal stability of the heat transfer fluid. Temperature stability is achieved by consistent monitoring of process fluid temperature, uniform circulation of fluid and by either adding or removing heat to maintain set-point within +/- 0.1 degree C.
4. The therMOstat surrounds the source bubbler in an enclosed environment and is able to accommodate a variety of source geometries. Open bath chillers evaporate moisture into an electronics cabinet, which complicates electronics calibration and contributes to temperature drift.
5. The therMOstat addresses the need for low cost of ownership in 4 ways:

• The therMOstat is designed to be maintenance free. There is no annual PM schedule.
• The therMOstat is designed to significantly reduce the cost of facility water plumbing and installation inside the tool. Up to 5 therMOstat systems can be installed in series.
• The therMOstat has a single moving part, which allows end users to comfortably achieve MTBF of > 30,000 hours.
• The reliability of the therMOstat dramatically improves tool availability and up-time. A significant reduction in spares and related repair costs accelerate payback.

Sizing Kit Options

The Noah POU therMOstat utilizes proven and reliable technology and includes DeviceNet communication functionality. This system provides unparalleled reliability, low Cost of Ownership and temperature control accuracy of +0.1 °C.

Please contact Noah Precision for more information about the POU therMOstat.

* POU therMOstat 8.0 Patent Pending