Temperature Control for Source Bubblers
The
Noah Precision POU therMOstat 8.0* is the first
thermoelectric temperature control system designed
specifically for MOCVD temperature control. The
therMOstat system was designed and manufactured
with feedback from MOCVD tool owners and OEM equipment
manufacturers to address the shortfalls associated
with existing compressor based chillers. The therMOstat
represents the state-of-the-art in MOCVD source
temperature control.
Below are five considerations for selecting a Temperature
Control System for MOCVD source temperature control:
- The therMOstat incorporates solid
state Peltier devices with no moving parts to provide
both heating and cooling in a single device. This
is a significant advance over mechanical chillers
with multiple moving parts.
- The thermoelectric heat pump is only
one aspect of the therMOstat system design. The
switching & control system incorporated into
the therMOstat allows for tight temperature control
by switching from heating to cooling, or visa-versa
based upon small changes in reservoir temperature.
- Temperature stability has been de-coupled
from incoming facility water temperature. The reservoir
in the therMOstat has been optimized to provide
thermal stability of the heat transfer fluid. Temperature
stability is achieved by consistent monitoring of
process fluid temperature, uniform circulation of
fluid and by either adding or removing heat to maintain
set-point within +/- 0.1 degree C.
- The therMOstat surrounds the source
bubbler in an enclosed environment and is able to
accommodate a variety of source geometries. Open
bath chillers evaporate moisture into an electronics
cabinet, which complicates electronics calibration
and contributes to temperature drift.
- The therMOstat addresses the need
for low cost of ownership in 4 ways:
- The therMOstat is designed to be
maintenance free. There is no annual PM schedule.
- The therMOstat is designed to significantly
reduce the cost of facility water plumbing and installation
inside the tool. Up to 5 therMOstat systems can
be installed in series.
- The therMOstat has a single moving
part, which allows end users to comfortably achieve
MTBF of > 30,000 hours.
- The reliability of the therMOstat
dramatically improves tool availability and up-time.
A significant reduction in spares and related repair
costs accelerate payback.
Sizing Kit Options
Diameter |
Length |
Part Number |
2 inch single source |
Up to 10 inches
|
903-S2-DIAMETER |
3 inch single source |
Up to 10 inches
|
903-S3-DIAMETER |
4 inch single source |
Up to 10 inches
|
903-S4-DIAMETER |
Dual 2 inch double source |
Up to 10 inches
|
903-D2-DIAMETER |
The Noah POU therMOstat utilizes proven and reliable
technology and includes DeviceNet communication
functionality. This system provides unparalleled
reliability, low Cost of Ownership and temperature
control accuracy of +0.1 °C.
Please contact
Noah Precision for more information about the
POU therMOstat.
* POU therMOstat 8.0 Patent Pending |